Photocatalytic Properties of Columnar Nanostructured TiO2 Films Fabricated by Sputtering Ti and Subsequent Annealing
Columnar nanostructured TiO2 films were prepared by sputtering Ti target in pure argon with glancing angle deposition (GLAD) and subsequent annealing at 400°C for different hours in air. Compared with sputtering TiO2 target directly, sputtering Ti target can be carried out under much lower base pres...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2012-01-01
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| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2012/413638 |