| Summary: | In this study, we present an inverted hybrid perovskite solar cell using Al doped Zinc Oxide (AZO) transparent metal oxide as substrate and anode electrode. Obtained results revealed that the AZO substrates prepared by RF magnetron sputtering with the optimal growth parameters have electrical and optical properties similar to properties of commercial Indium Tin Oxide (ITO), resistivity around 0.5 mΩcm and transparency around 85%. Hybrid perovskite thin films were coated onto the PEDOT:PSS/AZO and PEDOT:PSS/ITO substrates. The morphological, structural and optical properties of the perovskite films were comparatively studied by SEM, XRD, and UV-visible spectroscopy. Besides, inverted planar perovskite solar cells were fabricated on AZO and on ITO substrates by single solution coating. The champion cell exhibited short-circuit current of 22.26 mA/cm2, an open-circuit voltage of 0.87 V, and a fill factor of 0.51, led to a power conversion efficiency (PCE) 9.88% which is obtained by cell based on AZO substrate. The PCE value is comparable to efficiency of cell based on ITO,12.82%. Keywords: Zinc oxide thin film, One-step spin coating, Perovskite solar cell, High efficiency
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