Focused Ion Beam nano-patterning from traditional applications to single ion implantation perspectives
In this article we review some fundamentals of the Focused Ion Beam (FIB) technique based on scanning finely focused beams of gallium ions over a sample to perform direct writing. We analyse the main limitations of this technique in terms of damage generation or local contamination and through selec...
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| Format: | Article |
| Language: | English |
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De Gruyter
2014-01-01
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| Series: | Nanofabrication |
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| Online Access: | http://www.degruyter.com/view/j/nanofab.2014.1.issue-1/nanofab-2014-0004/nanofab-2014-0004.xml?format=INT |