Low-loss integrated photonics for the blue and ultraviolet regime
We present a low-loss integrated photonics platform in the visible and near ultraviolet (UV) regime. Fully etched waveguides based on atomic layer deposition (ALD) of aluminum oxide operate in a single transverse mode with <3 dB/cm propagation loss at a wavelength of 371 nm. Ring resonators with...
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AIP Publishing LLC
2019-02-01
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| Series: | APL Photonics |
| Online Access: | http://dx.doi.org/10.1063/1.5052502 |
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doaj-629a9e07f4864cee85edb155c3a643ab2020-11-24T23:31:33ZengAIP Publishing LLCAPL Photonics2378-09672019-02-0142026101026101-710.1063/1.5052502009812APPLow-loss integrated photonics for the blue and ultraviolet regimeGavin N. West0William Loh1Dave Kharas2Cheryl Sorace-Agaskar3Karan K. Mehta4Jeremy Sage5John Chiaverini6Rajeev J. Ram7Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USALincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02421, USALincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02421, USALincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02421, USADepartment of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USALincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02421, USALincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02421, USADepartment of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USAWe present a low-loss integrated photonics platform in the visible and near ultraviolet (UV) regime. Fully etched waveguides based on atomic layer deposition (ALD) of aluminum oxide operate in a single transverse mode with <3 dB/cm propagation loss at a wavelength of 371 nm. Ring resonators with intrinsic quality factors exceeding 470 000 are demonstrated at 405 nm, and the thermo-optic coefficient of ALD aluminum oxide is estimated to be 2.75 × 10−5 (RIU/°C). Absorption loss is sufficiently low to allow on-resonance operation with intra-cavity powers up to at least 12.5 mW, limited by available laser power. Experimental and simulated data indicate that the propagation loss is dominated by sidewall roughness, suggesting that lower loss in the blue and UV is achievable.http://dx.doi.org/10.1063/1.5052502 |
| collection |
DOAJ |
| language |
English |
| format |
Article |
| sources |
DOAJ |
| author |
Gavin N. West William Loh Dave Kharas Cheryl Sorace-Agaskar Karan K. Mehta Jeremy Sage John Chiaverini Rajeev J. Ram |
| spellingShingle |
Gavin N. West William Loh Dave Kharas Cheryl Sorace-Agaskar Karan K. Mehta Jeremy Sage John Chiaverini Rajeev J. Ram Low-loss integrated photonics for the blue and ultraviolet regime APL Photonics |
| author_facet |
Gavin N. West William Loh Dave Kharas Cheryl Sorace-Agaskar Karan K. Mehta Jeremy Sage John Chiaverini Rajeev J. Ram |
| author_sort |
Gavin N. West |
| title |
Low-loss integrated photonics for the blue and ultraviolet regime |
| title_short |
Low-loss integrated photonics for the blue and ultraviolet regime |
| title_full |
Low-loss integrated photonics for the blue and ultraviolet regime |
| title_fullStr |
Low-loss integrated photonics for the blue and ultraviolet regime |
| title_full_unstemmed |
Low-loss integrated photonics for the blue and ultraviolet regime |
| title_sort |
low-loss integrated photonics for the blue and ultraviolet regime |
| publisher |
AIP Publishing LLC |
| series |
APL Photonics |
| issn |
2378-0967 |
| publishDate |
2019-02-01 |
| description |
We present a low-loss integrated photonics platform in the visible and near ultraviolet (UV) regime. Fully etched waveguides based on atomic layer deposition (ALD) of aluminum oxide operate in a single transverse mode with <3 dB/cm propagation loss at a wavelength of 371 nm. Ring resonators with intrinsic quality factors exceeding 470 000 are demonstrated at 405 nm, and the thermo-optic coefficient of ALD aluminum oxide is estimated to be 2.75 × 10−5 (RIU/°C). Absorption loss is sufficiently low to allow on-resonance operation with intra-cavity powers up to at least 12.5 mW, limited by available laser power. Experimental and simulated data indicate that the propagation loss is dominated by sidewall roughness, suggesting that lower loss in the blue and UV is achievable. |
| url |
http://dx.doi.org/10.1063/1.5052502 |
| work_keys_str_mv |
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