Laser-Doping through Anodic Aluminium Oxide Layers for Silicon Solar Cells
This paper demonstrates that silicon can be locally doped with aluminium to form localised p+ surface regions by laser-doping through anodic aluminium oxide (AAO) layers formed on the silicon surface. The resulting p+ regions can extend more than 10 μm into the silicon and the electrically active p-...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2015-01-01
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| Series: | Journal of Nanomaterials |
| Online Access: | http://dx.doi.org/10.1155/2015/870839 |