Oxide-Free Bonding of III-V-Based Material on Silicon and Nano-Structuration of the Hybrid Waveguide for Advanced Optical Functions

Oxide-free bonding of III-V-based materials for integrated optics is demonstrated on both planar Silicon (Si) surfaces and nanostructured ones, using Silicon on Isolator (SOI) or Si substrates. The hybrid interface is characterized electrically and mechanically. A hybrid InP-on-SOI waveguide, includ...

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Main Authors: Konstantinos Pantzas, Ahmad Itawi, Isabelle Sagnes, Gilles Patriarche, Eric Le Bourhis, Anatole Lupu, Henri Benisty, Anne Talneau
Format: Article
Language:English
Published: MDPI AG 2015-10-01
Series:Photonics
Subjects:
Online Access:http://www.mdpi.com/2304-6732/2/4/1054
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spelling doaj-61e84122d22e46e9b28765af9d9e27432020-11-24T23:21:59ZengMDPI AGPhotonics2304-67322015-10-01241054106410.3390/photonics2041054photonics2041054Oxide-Free Bonding of III-V-Based Material on Silicon and Nano-Structuration of the Hybrid Waveguide for Advanced Optical FunctionsKonstantinos Pantzas0Ahmad Itawi1Isabelle Sagnes2Gilles Patriarche3Eric Le Bourhis4Anatole Lupu5Henri Benisty6Anne Talneau7Laboratoire de Photonique et de Nanostructures, route de Nozay, F-91460 Marcoussis, FranceLaboratoire de Photonique et de Nanostructures, route de Nozay, F-91460 Marcoussis, FranceLaboratoire de Photonique et de Nanostructures, route de Nozay, F-91460 Marcoussis, FranceLaboratoire de Photonique et de Nanostructures, route de Nozay, F-91460 Marcoussis, FranceInstitut P’, CNRS Université de Poitiers-Bd Marie Pierre Cuire, B.P. 30179, 86962 Futuroscope-Chasseneuil Cedex, FranceInstitut d’Electronique Fondamentale, Université d’Orsay, 91405 Orsay, FranceLaboratoire Charles Fabry, UMR 8501, Institut d’Optique, CNRS, Univ Paris Sud 11, 2 Avenue Augustin Fresnel, 91127 Palaiseau Cedex, FranceLaboratoire de Photonique et de Nanostructures, route de Nozay, F-91460 Marcoussis, FranceOxide-free bonding of III-V-based materials for integrated optics is demonstrated on both planar Silicon (Si) surfaces and nanostructured ones, using Silicon on Isolator (SOI) or Si substrates. The hybrid interface is characterized electrically and mechanically. A hybrid InP-on-SOI waveguide, including a bi-periodic nano structuration of the silicon guiding layer is demonstrated to provide wavelength selective transmission. Such an oxide-free interface associated with the nanostructured design of the guiding geometry has great potential for both electrical and optical operation of improved hybrid devices.http://www.mdpi.com/2304-6732/2/4/1054silicon photonics hybrid integrationIII-V materialswafer bondingoxide-free bondingsilicon waveguide nanopatterningtelecom optical functions
collection DOAJ
language English
format Article
sources DOAJ
author Konstantinos Pantzas
Ahmad Itawi
Isabelle Sagnes
Gilles Patriarche
Eric Le Bourhis
Anatole Lupu
Henri Benisty
Anne Talneau
spellingShingle Konstantinos Pantzas
Ahmad Itawi
Isabelle Sagnes
Gilles Patriarche
Eric Le Bourhis
Anatole Lupu
Henri Benisty
Anne Talneau
Oxide-Free Bonding of III-V-Based Material on Silicon and Nano-Structuration of the Hybrid Waveguide for Advanced Optical Functions
Photonics
silicon photonics hybrid integration
III-V materials
wafer bonding
oxide-free bonding
silicon waveguide nanopatterning
telecom optical functions
author_facet Konstantinos Pantzas
Ahmad Itawi
Isabelle Sagnes
Gilles Patriarche
Eric Le Bourhis
Anatole Lupu
Henri Benisty
Anne Talneau
author_sort Konstantinos Pantzas
title Oxide-Free Bonding of III-V-Based Material on Silicon and Nano-Structuration of the Hybrid Waveguide for Advanced Optical Functions
title_short Oxide-Free Bonding of III-V-Based Material on Silicon and Nano-Structuration of the Hybrid Waveguide for Advanced Optical Functions
title_full Oxide-Free Bonding of III-V-Based Material on Silicon and Nano-Structuration of the Hybrid Waveguide for Advanced Optical Functions
title_fullStr Oxide-Free Bonding of III-V-Based Material on Silicon and Nano-Structuration of the Hybrid Waveguide for Advanced Optical Functions
title_full_unstemmed Oxide-Free Bonding of III-V-Based Material on Silicon and Nano-Structuration of the Hybrid Waveguide for Advanced Optical Functions
title_sort oxide-free bonding of iii-v-based material on silicon and nano-structuration of the hybrid waveguide for advanced optical functions
publisher MDPI AG
series Photonics
issn 2304-6732
publishDate 2015-10-01
description Oxide-free bonding of III-V-based materials for integrated optics is demonstrated on both planar Silicon (Si) surfaces and nanostructured ones, using Silicon on Isolator (SOI) or Si substrates. The hybrid interface is characterized electrically and mechanically. A hybrid InP-on-SOI waveguide, including a bi-periodic nano structuration of the silicon guiding layer is demonstrated to provide wavelength selective transmission. Such an oxide-free interface associated with the nanostructured design of the guiding geometry has great potential for both electrical and optical operation of improved hybrid devices.
topic silicon photonics hybrid integration
III-V materials
wafer bonding
oxide-free bonding
silicon waveguide nanopatterning
telecom optical functions
url http://www.mdpi.com/2304-6732/2/4/1054
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