Oxide-Free Bonding of III-V-Based Material on Silicon and Nano-Structuration of the Hybrid Waveguide for Advanced Optical Functions
Oxide-free bonding of III-V-based materials for integrated optics is demonstrated on both planar Silicon (Si) surfaces and nanostructured ones, using Silicon on Isolator (SOI) or Si substrates. The hybrid interface is characterized electrically and mechanically. A hybrid InP-on-SOI waveguide, includ...
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doaj-61e84122d22e46e9b28765af9d9e27432020-11-24T23:21:59ZengMDPI AGPhotonics2304-67322015-10-01241054106410.3390/photonics2041054photonics2041054Oxide-Free Bonding of III-V-Based Material on Silicon and Nano-Structuration of the Hybrid Waveguide for Advanced Optical FunctionsKonstantinos Pantzas0Ahmad Itawi1Isabelle Sagnes2Gilles Patriarche3Eric Le Bourhis4Anatole Lupu5Henri Benisty6Anne Talneau7Laboratoire de Photonique et de Nanostructures, route de Nozay, F-91460 Marcoussis, FranceLaboratoire de Photonique et de Nanostructures, route de Nozay, F-91460 Marcoussis, FranceLaboratoire de Photonique et de Nanostructures, route de Nozay, F-91460 Marcoussis, FranceLaboratoire de Photonique et de Nanostructures, route de Nozay, F-91460 Marcoussis, FranceInstitut P’, CNRS Université de Poitiers-Bd Marie Pierre Cuire, B.P. 30179, 86962 Futuroscope-Chasseneuil Cedex, FranceInstitut d’Electronique Fondamentale, Université d’Orsay, 91405 Orsay, FranceLaboratoire Charles Fabry, UMR 8501, Institut d’Optique, CNRS, Univ Paris Sud 11, 2 Avenue Augustin Fresnel, 91127 Palaiseau Cedex, FranceLaboratoire de Photonique et de Nanostructures, route de Nozay, F-91460 Marcoussis, FranceOxide-free bonding of III-V-based materials for integrated optics is demonstrated on both planar Silicon (Si) surfaces and nanostructured ones, using Silicon on Isolator (SOI) or Si substrates. The hybrid interface is characterized electrically and mechanically. A hybrid InP-on-SOI waveguide, including a bi-periodic nano structuration of the silicon guiding layer is demonstrated to provide wavelength selective transmission. Such an oxide-free interface associated with the nanostructured design of the guiding geometry has great potential for both electrical and optical operation of improved hybrid devices.http://www.mdpi.com/2304-6732/2/4/1054silicon photonics hybrid integrationIII-V materialswafer bondingoxide-free bondingsilicon waveguide nanopatterningtelecom optical functions |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Konstantinos Pantzas Ahmad Itawi Isabelle Sagnes Gilles Patriarche Eric Le Bourhis Anatole Lupu Henri Benisty Anne Talneau |
spellingShingle |
Konstantinos Pantzas Ahmad Itawi Isabelle Sagnes Gilles Patriarche Eric Le Bourhis Anatole Lupu Henri Benisty Anne Talneau Oxide-Free Bonding of III-V-Based Material on Silicon and Nano-Structuration of the Hybrid Waveguide for Advanced Optical Functions Photonics silicon photonics hybrid integration III-V materials wafer bonding oxide-free bonding silicon waveguide nanopatterning telecom optical functions |
author_facet |
Konstantinos Pantzas Ahmad Itawi Isabelle Sagnes Gilles Patriarche Eric Le Bourhis Anatole Lupu Henri Benisty Anne Talneau |
author_sort |
Konstantinos Pantzas |
title |
Oxide-Free Bonding of III-V-Based Material on Silicon and Nano-Structuration of the Hybrid Waveguide for Advanced Optical Functions |
title_short |
Oxide-Free Bonding of III-V-Based Material on Silicon and Nano-Structuration of the Hybrid Waveguide for Advanced Optical Functions |
title_full |
Oxide-Free Bonding of III-V-Based Material on Silicon and Nano-Structuration of the Hybrid Waveguide for Advanced Optical Functions |
title_fullStr |
Oxide-Free Bonding of III-V-Based Material on Silicon and Nano-Structuration of the Hybrid Waveguide for Advanced Optical Functions |
title_full_unstemmed |
Oxide-Free Bonding of III-V-Based Material on Silicon and Nano-Structuration of the Hybrid Waveguide for Advanced Optical Functions |
title_sort |
oxide-free bonding of iii-v-based material on silicon and nano-structuration of the hybrid waveguide for advanced optical functions |
publisher |
MDPI AG |
series |
Photonics |
issn |
2304-6732 |
publishDate |
2015-10-01 |
description |
Oxide-free bonding of III-V-based materials for integrated optics is demonstrated on both planar Silicon (Si) surfaces and nanostructured ones, using Silicon on Isolator (SOI) or Si substrates. The hybrid interface is characterized electrically and mechanically. A hybrid InP-on-SOI waveguide, including a bi-periodic nano structuration of the silicon guiding layer is demonstrated to provide wavelength selective transmission. Such an oxide-free interface associated with the nanostructured design of the guiding geometry has great potential for both electrical and optical operation of improved hybrid devices. |
topic |
silicon photonics hybrid integration III-V materials wafer bonding oxide-free bonding silicon waveguide nanopatterning telecom optical functions |
url |
http://www.mdpi.com/2304-6732/2/4/1054 |
work_keys_str_mv |
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