Miniaturized Two-Dimensional Optical Scanner Based on Planar Waveguide and Flexible Printed Circuit Beam Deflectors

• Main Authors: Yingshun Xu, Shujing Liu, Suogang Wang
• Format: Article
• Language: English
• Published: IEEE 2017-01-01
• Series: IEEE Photonics Journal
• Subjects: Micro and nano opto-electro-mechanical systems (MOEMS); endoscopic imaging; waveguide devices
• Online Access: https://ieeexplore.ieee.org/document/7967665/
• ISSN: 1943-0655

In this paper, we present a miniaturized two-dimensional (2-D) optical scanner for endoscopic imaging applications. The optical scanner is based on a hybrid actuation, which is composed of a planar waveguide (PWG) beam deflector for the fast axis and an electrothermally actuated flexible printed circuit beam deflector for the slow axis. The PWG beam deflector utilizing a microheater prism array to rapidly modulate the refractive index of three layers of the PWG is based on the thermo-optic effect. Maximum optical deflection angles of 8.6° for the PWG and 12.4° for the FPC beam deflectors are experimentally achieved. A 1.2-Hz 2-D imaging rate is tested. By assembling two beam deflectors together as well as two rod lenses, an optical scanner highlights small outline dimensions and low-drive voltages, which makes it feasible for endoscopic imaging purposes.