ESTIMATE OF THE NONLINEARITY OF THE SELF-OSCILLATING ACCELEROMETER WITH THE PENDULUM SENSITIVE ELEMENT

• Main Author: S. R. Karpikov
• Format: Article
• Language: English
• Published: CRI «Electronics» 2018-03-01
• Series: Радиопромышленность
• Subjects: computer simulation; nonlinear systems; microelectromechanical systems; accelerometer; self-oscillations
• Online Access: https://www.radioprom.org/jour/article/view/272

The object of study is the design of the self-oscillating accelerometer, wherein the inertial mass, which is a sensitive element, is executed in the form of a pendulum. An option of implementation of such a sensor is proposed with the use of micromechanical technology. Nonlinearity of the characteristic of the conversion of the presented circuit is compared with a similar sensor wherein a linear sensing element is used. The study is carried out with the use of numerical calculation and computer simulation of the sensors transformation characteristics based on the equation of the sensitive element motion. On the basis of the simulation results the nonlinearity is determined both within the limits of the stable operation of the sensor and in the operating range of the measurements. Despite the increase in nonlinearity in the full range of measurements, in the operating range no significant differences have been observed in the conversion characteristic for the self-oscillating sensor with a linear and pendulum sensitive element.