Thermal Conductivity of Nano-Crystallized Indium-Gallium-Zinc Oxide Thin Films Determined by Differential Three-Omega Method
The temperature dependence thermal conductivity of the indium-gallium-zinc oxide (IGZO) thin films was investigated with the differential three-omega method for the clear demonstration of nanocrystallinity. The thin films were deposited on an alumina (α-Al<sub>2</sub>O<sub>3</su...
Main Authors: | Rauf Khan, Michitaka Ohtaki, Satoshi Hata, Koji Miyazaki, Reiji Hattori |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-06-01
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Series: | Nanomaterials |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-4991/11/6/1547 |
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