Application of an Electrical Low Pressure Impactor (ELPI) for Residual Particle Measurement in an Epitaxial Growth Reactor
The purpose of this study was to determine the feasibility of using an electrical low pressure impactor (ELPI) for analyzing residual particles in a Si epitaxial growth process chamber and establish an application technique. Prior to experimental measurements, some preliminary works were conducted,...
| Main Authors: | , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-08-01
|
| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/11/16/7680 |