Effect of Silver Dopants on the ZnO Thin Films Prepared by a Radio Frequency Magnetron Co-Sputtering System

Effect of Silver Dopants on the ZnO Thin Films Prepared by a Radio Frequency Magnetron Co-Sputtering System

Ag-ZnO co-sputtered films at various atomic ratios of Ag (Ag/(Ag + Zn) at.%) were prepared by a radio frequency magnetron cosputtering system, using the co-sputtered targets of Ag and ZnO. The activation of the Ag acceptors (AgZn) and the formation of the Ag aggregations (Ag0) in the ZnO matrix were...

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Bibliographic Details
Main Authors: Fang-Cheng Liu, Jyun-Yong Li, Tai-Hong Chen, Chun-How Chang, Ching-Ting Lee, Wei-Hua Hsiao, Day-Shan Liu
Format: Article
Language:English
Published: MDPI AG 2017-07-01
Series:Materials
Subjects:
Ag-ZnO co-sputtered film
radio frequency magnetron co-sputtered system
Ag acceptors
Ag aggregations
p-type conduction
Online Access:https://www.mdpi.com/1996-1944/10/7/797

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