Effect of Silver Dopants on the ZnO Thin Films Prepared by a Radio Frequency Magnetron Co-Sputtering System

Effect of Silver Dopants on the ZnO Thin Films Prepared by a Radio Frequency Magnetron Co-Sputtering System

Ag-ZnO co-sputtered films at various atomic ratios of Ag (Ag/(Ag + Zn) at.%) were prepared by a radio frequency magnetron cosputtering system, using the co-sputtered targets of Ag and ZnO. The activation of the Ag acceptors (AgZn) and the formation of the Ag aggregations (Ag0) in the ZnO matrix were...

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Bibliographic Details
Main Authors: Fang-Cheng Liu, Jyun-Yong Li, Tai-Hong Chen, Chun-How Chang, Ching-Ting Lee, Wei-Hua Hsiao, Day-Shan Liu
Format: Article
Language:English
Published: MDPI AG 2017-07-01
Series:Materials
Subjects:
Ag-ZnO co-sputtered film
radio frequency magnetron co-sputtered system
Ag acceptors
Ag aggregations
p-type conduction
Online Access:https://www.mdpi.com/1996-1944/10/7/797
Description
Summary:Ag-ZnO co-sputtered films at various atomic ratios of Ag (Ag/(Ag + Zn) at.%) were prepared by a radio frequency magnetron cosputtering system, using the co-sputtered targets of Ag and ZnO. The activation of the Ag acceptors (AgZn) and the formation of the Ag aggregations (Ag0) in the ZnO matrix were investigated from XRD, Raman scattering, and XPS measurements. The Ag-ZnO co-sputtered film behaving like a p-type conduction was achievable after annealing at 350 °C under air ambient for 1 h.
ISSN:1996-1944

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