Fatigue Life Analysis of Cantilever Probe on Wafer Test

Fatigue Life Analysis of Cantilever Probe on Wafer Test

This research utilizes the finite element analysis software (ANSYS) to stimulate the different probe material quality (tungsten, SUS304 stainless steel, SUS316L stainless steel and SKD11 tool steel, respectively) during wafer tests. Under a room temperature of (25°C), the stress and fatigue life (cy...

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Bibliographic Details
Main Authors:	Hsiao Te-Ching, Chang Hao-Yuan, Huang Shyh-Chour
Format:	Article
Language:	English
Published:	EDP Sciences 2016-01-01
Series:	MATEC Web of Conferences
Online Access:	http://dx.doi.org/10.1051/matecconf/20167104007

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