Micro Electrochemical Milling of Micro Metal Parts with Rotating Ultrasonic Electrode

Micro Electrochemical Milling of Micro Metal Parts with Rotating Ultrasonic Electrode

With the rapid development of MEMS, the demand for metal microstructure is increasing. Micro electrochemical milling technology (MECM) is capable of manufacturing micro metallic devices or components based on the principle of electrochemical anode dissolution. To improve the capacity of MECM, this p...

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Bibliographic Details
Main Authors: Yong Liu, Haoran Chen, Shenghai Wang, Kan Wang, Minghao Li, Tengfei Peng
Format: Article
Language:English
Published: MDPI AG 2020-11-01
Series:Sensors
Subjects:
micro electrochemical milling
ultrasonic vibration
surface quality
machining localization
microstructures
Online Access:https://www.mdpi.com/1424-8220/20/22/6617

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