Measurement Error of a Coupled AFM Probe-Elastic Membrane System
The characteristic of an AFM probe scanning the topography on an elastic substrate is investigated. It is different to the conventional rigid substrate. The analytical solution of the novel system is presented. For an elastic substrate the errors of frequency shift determined by using the force grad...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2018-01-01
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| Series: | Mathematical Problems in Engineering |
| Online Access: | http://dx.doi.org/10.1155/2018/2789684 |