Measurement Error of a Coupled AFM Probe-Elastic Membrane System

Measurement Error of a Coupled AFM Probe-Elastic Membrane System

The characteristic of an AFM probe scanning the topography on an elastic substrate is investigated. It is different to the conventional rigid substrate. The analytical solution of the novel system is presented. For an elastic substrate the errors of frequency shift determined by using the force grad...

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Main Authors: Shueei-Muh Lin, Che-Lun Tsai, Hung-Chang Lee
Format: Article
Language:English
Published: Hindawi Limited 2018-01-01
Series:Mathematical Problems in Engineering
Online Access:http://dx.doi.org/10.1155/2018/2789684
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spelling doaj-5cd49c575bf04a30a468d64e85a2e81b2020-11-24T20:44:14ZengHindawi LimitedMathematical Problems in Engineering1024-123X1563-51472018-01-01201810.1155/2018/27896842789684Measurement Error of a Coupled AFM Probe-Elastic Membrane SystemShueei-Muh Lin0Che-Lun Tsai1Hung-Chang Lee2Mechanical Engineering Department, Kun Shan University, Tainan 710-03, TaiwanMechanical Engineering Department, Kun Shan University, Tainan 710-03, TaiwanMechanical Engineering Department, Kun Shan University, Tainan 710-03, TaiwanThe characteristic of an AFM probe scanning the topography on an elastic substrate is investigated. It is different to the conventional rigid substrate. The analytical solution of the novel system is presented. For an elastic substrate the errors of frequency shift determined by using the force gradient methods and the perturbation method are satisfactory only for larger tip-surface distances. The smaller the interacting distance is, the larger the measurement error due to the amplitude of membrane is.http://dx.doi.org/10.1155/2018/2789684
collection DOAJ
language English
format Article
sources DOAJ
author Shueei-Muh Lin
Che-Lun Tsai
Hung-Chang Lee
spellingShingle Shueei-Muh Lin
Che-Lun Tsai
Hung-Chang Lee
Measurement Error of a Coupled AFM Probe-Elastic Membrane System
Mathematical Problems in Engineering
author_facet Shueei-Muh Lin
Che-Lun Tsai
Hung-Chang Lee
author_sort Shueei-Muh Lin
title Measurement Error of a Coupled AFM Probe-Elastic Membrane System
title_short Measurement Error of a Coupled AFM Probe-Elastic Membrane System
title_full Measurement Error of a Coupled AFM Probe-Elastic Membrane System
title_fullStr Measurement Error of a Coupled AFM Probe-Elastic Membrane System
title_full_unstemmed Measurement Error of a Coupled AFM Probe-Elastic Membrane System
title_sort measurement error of a coupled afm probe-elastic membrane system
publisher Hindawi Limited
series Mathematical Problems in Engineering
issn 1024-123X
1563-5147
publishDate 2018-01-01
description The characteristic of an AFM probe scanning the topography on an elastic substrate is investigated. It is different to the conventional rigid substrate. The analytical solution of the novel system is presented. For an elastic substrate the errors of frequency shift determined by using the force gradient methods and the perturbation method are satisfactory only for larger tip-surface distances. The smaller the interacting distance is, the larger the measurement error due to the amplitude of membrane is.
url http://dx.doi.org/10.1155/2018/2789684
work_keys_str_mv AT shueeimuhlin measurementerrorofacoupledafmprobeelasticmembranesystem
AT cheluntsai measurementerrorofacoupledafmprobeelasticmembranesystem
AT hungchanglee measurementerrorofacoupledafmprobeelasticmembranesystem
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