Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes
<p>Abstract</p> <p>In this study, nano-scale honeycomb-shaped structures with anti-reflection properties were successfully formed on SiC. The surface of 4H-SiC wafer after a conventional photolithography process was etched by inductively coupled plasma. We demonstrate that the refl...
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| Format: | Article |
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SpringerOpen
2011-01-01
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| Series: | Nanoscale Research Letters |
| Online Access: | http://www.nanoscalereslett.com/content/6/1/236 |
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doaj-5ba85788ad80424eba8162bc5e3c46952020-11-25T00:57:39ZengSpringerOpenNanoscale Research Letters1931-75731556-276X2011-01-0161236Anti-reflective nano- and micro-structures on 4H-SiC for photodiodesJoo Sung-JaeBahng WookKim Nam-KyunKang Min-SeokLee Ji-HoonKoo Sang-Mo<p>Abstract</p> <p>In this study, nano-scale honeycomb-shaped structures with anti-reflection properties were successfully formed on SiC. The surface of 4H-SiC wafer after a conventional photolithography process was etched by inductively coupled plasma. We demonstrate that the reflection characteristic of the fabricated photodiodes has significantly reduced by 55% compared with the reference devices. As a result, the optical response <it>I</it><sub>illumination</sub>/<it>I</it><sub>dark </sub>of the 4H-SiC photodiodes were enhanced up to 178%, which can be ascribed primarily to the improved light trapping in the proposed nano-scale texturing.</p> http://www.nanoscalereslett.com/content/6/1/236 |
| collection |
DOAJ |
| language |
English |
| format |
Article |
| sources |
DOAJ |
| author |
Joo Sung-Jae Bahng Wook Kim Nam-Kyun Kang Min-Seok Lee Ji-Hoon Koo Sang-Mo |
| spellingShingle |
Joo Sung-Jae Bahng Wook Kim Nam-Kyun Kang Min-Seok Lee Ji-Hoon Koo Sang-Mo Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes Nanoscale Research Letters |
| author_facet |
Joo Sung-Jae Bahng Wook Kim Nam-Kyun Kang Min-Seok Lee Ji-Hoon Koo Sang-Mo |
| author_sort |
Joo Sung-Jae |
| title |
Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes |
| title_short |
Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes |
| title_full |
Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes |
| title_fullStr |
Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes |
| title_full_unstemmed |
Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes |
| title_sort |
anti-reflective nano- and micro-structures on 4h-sic for photodiodes |
| publisher |
SpringerOpen |
| series |
Nanoscale Research Letters |
| issn |
1931-7573 1556-276X |
| publishDate |
2011-01-01 |
| description |
<p>Abstract</p> <p>In this study, nano-scale honeycomb-shaped structures with anti-reflection properties were successfully formed on SiC. The surface of 4H-SiC wafer after a conventional photolithography process was etched by inductively coupled plasma. We demonstrate that the reflection characteristic of the fabricated photodiodes has significantly reduced by 55% compared with the reference devices. As a result, the optical response <it>I</it><sub>illumination</sub>/<it>I</it><sub>dark </sub>of the 4H-SiC photodiodes were enhanced up to 178%, which can be ascribed primarily to the improved light trapping in the proposed nano-scale texturing.</p> |
| url |
http://www.nanoscalereslett.com/content/6/1/236 |
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