Mechanical Characterization of Polysilicon MEMS: A Hybrid TMCMC/POD-Kriging Approach

Microscale uncertainties related to the geometry and morphology of polycrystalline silicon films, constituting the movable structures of micro electro-mechanical systems (MEMS), were investigated through a joint numerical/experimental approach. An on-chip testing device was designed and fabricated t...

Full description

Bibliographic Details
Main Authors: Ramin Mirzazadeh, Saeed Eftekhar Azam, Stefano Mariani
Format: Article
Language:English
Published: MDPI AG 2018-04-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/18/4/1243
id doaj-5a3b267bf12548ceb728eadcdab920c5
record_format Article
spelling doaj-5a3b267bf12548ceb728eadcdab920c52020-11-24T20:43:40ZengMDPI AGSensors1424-82202018-04-01184124310.3390/s18041243s18041243Mechanical Characterization of Polysilicon MEMS: A Hybrid TMCMC/POD-Kriging ApproachRamin Mirzazadeh0Saeed Eftekhar Azam1Stefano Mariani2Department of Civil and Environmental Engineering, Politecnico di Milano, Piazza L. da Vinci 32, 20133 Milano, ItalyDepartment of Civil Engineering, University of Nebraska-Lincoln, 2200 Vine St, Lincoln, NE 68503, USADepartment of Civil and Environmental Engineering, Politecnico di Milano, Piazza L. da Vinci 32, 20133 Milano, ItalyMicroscale uncertainties related to the geometry and morphology of polycrystalline silicon films, constituting the movable structures of micro electro-mechanical systems (MEMS), were investigated through a joint numerical/experimental approach. An on-chip testing device was designed and fabricated to deform a compliant polysilicon beam. In previous studies, we showed that the scattering in the input–output characteristics of the device can be properly described only if statistical features related to the morphology of the columnar polysilicon film and to the etching process adopted to release the movable structure are taken into account. In this work, a high fidelity finite element model of the device was used to feed a transitional Markov chain Monte Carlo (TMCMC) algorithm for the estimation of the unknown parameters governing the aforementioned statistical features. To reduce the computational cost of the stochastic analysis, a synergy of proper orthogonal decomposition (POD) and kriging interpolation was adopted. Results are reported for a batch of nominally identical tested devices, in terms of measurement error-affected probability distributions of the overall Young’s modulus of the polysilicon film and of the overetch depth.http://www.mdpi.com/1424-8220/18/4/1243micro electro-mechanical systems (MEMS)uncertainty quantificationtransitional Markov chain Monte Carlo (TMCMC) analysisreduced-order modelingpolysilicon morphologyoveretch
collection DOAJ
language English
format Article
sources DOAJ
author Ramin Mirzazadeh
Saeed Eftekhar Azam
Stefano Mariani
spellingShingle Ramin Mirzazadeh
Saeed Eftekhar Azam
Stefano Mariani
Mechanical Characterization of Polysilicon MEMS: A Hybrid TMCMC/POD-Kriging Approach
Sensors
micro electro-mechanical systems (MEMS)
uncertainty quantification
transitional Markov chain Monte Carlo (TMCMC) analysis
reduced-order modeling
polysilicon morphology
overetch
author_facet Ramin Mirzazadeh
Saeed Eftekhar Azam
Stefano Mariani
author_sort Ramin Mirzazadeh
title Mechanical Characterization of Polysilicon MEMS: A Hybrid TMCMC/POD-Kriging Approach
title_short Mechanical Characterization of Polysilicon MEMS: A Hybrid TMCMC/POD-Kriging Approach
title_full Mechanical Characterization of Polysilicon MEMS: A Hybrid TMCMC/POD-Kriging Approach
title_fullStr Mechanical Characterization of Polysilicon MEMS: A Hybrid TMCMC/POD-Kriging Approach
title_full_unstemmed Mechanical Characterization of Polysilicon MEMS: A Hybrid TMCMC/POD-Kriging Approach
title_sort mechanical characterization of polysilicon mems: a hybrid tmcmc/pod-kriging approach
publisher MDPI AG
series Sensors
issn 1424-8220
publishDate 2018-04-01
description Microscale uncertainties related to the geometry and morphology of polycrystalline silicon films, constituting the movable structures of micro electro-mechanical systems (MEMS), were investigated through a joint numerical/experimental approach. An on-chip testing device was designed and fabricated to deform a compliant polysilicon beam. In previous studies, we showed that the scattering in the input–output characteristics of the device can be properly described only if statistical features related to the morphology of the columnar polysilicon film and to the etching process adopted to release the movable structure are taken into account. In this work, a high fidelity finite element model of the device was used to feed a transitional Markov chain Monte Carlo (TMCMC) algorithm for the estimation of the unknown parameters governing the aforementioned statistical features. To reduce the computational cost of the stochastic analysis, a synergy of proper orthogonal decomposition (POD) and kriging interpolation was adopted. Results are reported for a batch of nominally identical tested devices, in terms of measurement error-affected probability distributions of the overall Young’s modulus of the polysilicon film and of the overetch depth.
topic micro electro-mechanical systems (MEMS)
uncertainty quantification
transitional Markov chain Monte Carlo (TMCMC) analysis
reduced-order modeling
polysilicon morphology
overetch
url http://www.mdpi.com/1424-8220/18/4/1243
work_keys_str_mv AT raminmirzazadeh mechanicalcharacterizationofpolysiliconmemsahybridtmcmcpodkrigingapproach
AT saeedeftekharazam mechanicalcharacterizationofpolysiliconmemsahybridtmcmcpodkrigingapproach
AT stefanomariani mechanicalcharacterizationofpolysiliconmemsahybridtmcmcpodkrigingapproach
_version_ 1716819218770427904