Effect of annealing temperature on microstructure and mechanical response of sputter deposited Ti-Zr-Mo high temperature shape memory alloy thin films
The shape memory thin films are most suitable candidates as actuators in MEMS applications than other smart materials due to its ability to produce larger recovery strains at low operation voltages. Recently, Ti based shape memory alloys are gaining attention due to its ability to produce stable sha...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-12-01
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| Series: | Applied Surface Science Advances |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2666523921000830 |