A Review on Active 3D Microstructures via Direct Laser Lithography
Direct laser lithography (DLL) is a key enabling technology for 3D constructs at the microscale and its potential is rapidly growing toward the development of active microstructures. The rationale of this work is based on the different involved methodology, which is referred as indirect, when passiv...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2021-09-01
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| Series: | Advanced Intelligent Systems |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/aisy.202100051 |