Effective Evaluation Strategy Toward Low Temperature Solution-Processed Oxide Dielectrics for TFT Device

Effective Evaluation Strategy Toward Low Temperature Solution-Processed Oxide Dielectrics for TFT Device

Solution-processed oxide dielectrics are widely studied as alternatives to SiO<sub>2</sub>, SiN<sub>x</sub> in thin film transistors for high capacitance and low energy consuming. However, it's still a challenge to achieve high quality of solution-processed oxide dielect...

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Bibliographic Details
Main Authors: Wei Cai, Honglong Ning, Shangxiong Zhou, Zhennan Zhu, Rihui Yao, Jianqiu Chen, Ruiqiang Tao, Zhiqiang Fang, Xubing Lu, Junbiao Peng
Format: Article
Language:English
Published: IEEE 2019-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
TFT
solution-processed
oxide dielectric
microwave photoconductivity decay
subthreshold swing (SS)
Online Access:https://ieeexplore.ieee.org/document/8890618/

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