Reproducibility of Properties of SnOx Thin Films Prepared by Reactive Sputtering
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Format: | Article |
Language: | English |
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Hindawi Limited
1985-01-01
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Series: | Active and Passive Electronic Components |
Online Access: | http://dx.doi.org/10.1155/APEC.11.271 |
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doaj-58a982e5e7fd48a9a1f1690632261c432020-11-24T23:28:07ZengHindawi LimitedActive and Passive Electronic Components0882-75161563-50311985-01-0111427128010.1155/APEC.11.271Reproducibility of Properties of SnOx Thin Films Prepared by Reactive SputteringLubomila Krol-StepniewskaGrazyna Beensh-Marchwickahttp://dx.doi.org/10.1155/APEC.11.271 |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Lubomila Krol-Stepniewska Grazyna Beensh-Marchwicka |
spellingShingle |
Lubomila Krol-Stepniewska Grazyna Beensh-Marchwicka Reproducibility of Properties of SnOx Thin Films Prepared by Reactive Sputtering Active and Passive Electronic Components |
author_facet |
Lubomila Krol-Stepniewska Grazyna Beensh-Marchwicka |
author_sort |
Lubomila Krol-Stepniewska |
title |
Reproducibility of Properties of SnOx Thin Films Prepared by Reactive Sputtering |
title_short |
Reproducibility of Properties of SnOx Thin Films Prepared by Reactive Sputtering |
title_full |
Reproducibility of Properties of SnOx Thin Films Prepared by Reactive Sputtering |
title_fullStr |
Reproducibility of Properties of SnOx Thin Films Prepared by Reactive Sputtering |
title_full_unstemmed |
Reproducibility of Properties of SnOx Thin Films Prepared by Reactive Sputtering |
title_sort |
reproducibility of properties of snox thin films prepared by reactive sputtering |
publisher |
Hindawi Limited |
series |
Active and Passive Electronic Components |
issn |
0882-7516 1563-5031 |
publishDate |
1985-01-01 |
url |
http://dx.doi.org/10.1155/APEC.11.271 |
work_keys_str_mv |
AT lubomilakrolstepniewska reproducibilityofpropertiesofsnoxthinfilmspreparedbyreactivesputtering AT grazynabeenshmarchwicka reproducibilityofpropertiesofsnoxthinfilmspreparedbyreactivesputtering |
_version_ |
1725550677095088128 |