Reproducibility of Properties of SnOx Thin Films Prepared by Reactive Sputtering
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
Hindawi Limited
1985-01-01
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Series: | Active and Passive Electronic Components |
Online Access: | http://dx.doi.org/10.1155/APEC.11.271 |
ISSN: | 0882-7516 1563-5031 |
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