IN-LINE SPUTTERING COATER OF HYDROPHOBIC ANTIREFLECTION COATING FOR SENSOR DISPLAYS

IN-LINE SPUTTERING COATER OF HYDROPHOBIC ANTIREFLECTION COATING FOR SENSOR DISPLAYS

The aim of the work is to develop vacuum technological equipment for deposition an interference antireflection coating with the evaporation of a hydrophobic protective layer in a single vacuum cycle. To deposition an interference antireflection coating, the method of magnetron reactive sputtering in...

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Bibliographic Details
Main Authors: A. S. Myslivets, P. A. Rozel, E. A. Khakhlov
Format: Article
Language:Russian
Published: Educational institution «Belarusian State University of Informatics and Radioelectronics» 2019-12-01
Series:Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Subjects:
magnetron sputtering
vacuum system
oxide films
Online Access:https://doklady.bsuir.by/jour/article/view/2108

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