An Accurate Study on Capacitive Microphone with Circular Diaphragm Using a Higher Order Elasticity Theory

• Main Authors: Shakiba Dowlati, Ghader Rezazadeh, Saeid Afrang, Mehrdad Sheykhlou, Aysan Madan Pasandi
• Format: Article
• Language: English
• Published: Marcílio Alves
• Series: Latin American Journal of Solids and Structures
• Subjects: MEMS; capacitive microphone; couple stress theory; length scale parameter; sensitivity
• Online Access: http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1679-78252016000400590&lng=en&tlng=en

Abstract This study has been undertaken to investigate the mechanical behavior of the capacitive microphone with clamped circular diaphragm using modified couple stress theory in comparison to the classical one. Presence of the length scale parameter in modified couple stress theory provides the means to evaluate the size effect on the microphone mechanical behavior. Investigating Pull-in phenomenon and dynamic behavior of the microphone are the matters provided due to the application of a step DC voltage. Also the effects of different air damping coefficients on dynamic pull-in voltage and pull-in time have been studied. The output level or sensitivity of the microphone has been studied by investigating the frequency response in term of magnitude for different length scale parameters to figure out how the length scale parameter affects on the sensitivity of the capacitive microphone. To achieve these ends, the nonlinear differential equation of the circular diaphragm has been extracted using Kirchhoff thin plate theory. Then, a Step-by-Step Linearization Method (SSLM) has been used to escape from the nonlinearity of the differential equation. Afterwards, Galerkin-based reduced-order model has been applied to solve the obtained equation.