Miniature on-fiber extrinsic Fabry-Perot interferometric vibration sensors based on micro-cantilever beam

• Main Authors: Ma Weiyi, Jiang Yi, Zhang Han, Zhang Liuchao, Hu Jie, Jiang Lan
• Format: Article
• Language: English
• Published: De Gruyter 2019-11-01
• Series: Nanotechnology Reviews
• Subjects: extrinsic fabry–perot interferometer; vibration sensor; fiber optical sensor; femtosecond laser micromachining
• Online Access: https://doi.org/10.1515/ntrev-2019-0028
• ISSN: 2191-9097

An on-fiber extrinsic Fabry–Perot interferometric (EFPI) vibration sensor based on micro-cantilever beam is proposed and experimentally demonstrated. The micro-cantilever beam, with a cantilever length of 80μm and a cantilever thickness of 5μm, is created perpendicular to the fiber axis by using the femtosecond laser micro-machining technique. The on-fiber vibration sensor has same diameter with that of the single mode fiber. An acceleration sensitivity of 11.1 mV/g@300 Hz in the range of 0.5-5g is demonstrated experimentally. This on-fiber and micro-cantilever beam design allows for the sensor to be smaller size and higher temperature resistance.