Effect of Annealing Temperature on Microstructure and Resistivity of TiC Thin Films

Titanium carbide (TiC) thin films were prepared by non-reactive simultaneous double magnetron sputtering. After deposition, all samples were annealed at different temperatures under high-vacuum conditions. This paper mainly discusses the influence of deposition methods and annealing temperatures on...

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Bibliographic Details
Main Authors: Litipu Aihaiti, Kamale Tuokedaerhan, Beysen Sadeh, Min Zhang, Xiangqian Shen, Abuduwaili Mijiti
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Coatings
Subjects:
Online Access:https://www.mdpi.com/2079-6412/11/4/457