Gasosensing elements on the base of SiPcCl2 films
Influence of technological parameters (reception conditions, heat treatment and thickness) on electric and sensing properties of SiPcCl2 films is analyzed. The films are received by a evaporating method. High sensitivity to oxides of nitrogen is shown. Electric and sensing properties are compared at...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Politehperiodika
2010-03-01
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| Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
| Subjects: | |
| Online Access: | http://www.tkea.com.ua/tkea/2010/2_2010/pdf/14.zip |