Instability and Drift Phenomena in Switching RF-MEMS Microsystems

Instability and Drift Phenomena in Switching RF-MEMS Microsystems

MEMS switches include mobile beams in their mechanical structure and these suspended parts are essential for the device functioning. This paper illustrates the most important instability phenomena related to MEMS switches. Starting from the most important instability exploited in these devices&#...

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Bibliographic Details
Main Author: Viviana Mulloni
Format: Article
Language:English
Published: MDPI AG 2019-02-01
Series:Actuators
Subjects:
RF-MEMS
RF switch
electrical actuation
Online Access:https://www.mdpi.com/2076-0825/8/1/15
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spelling doaj-564e05672f1c47b6908cc083b7291ce22020-11-24T20:45:03ZengMDPI AGActuators2076-08252019-02-01811510.3390/act8010015act8010015Instability and Drift Phenomena in Switching RF-MEMS MicrosystemsViviana Mulloni0Centre for Materials and Microsystems, Fondazione Bruno Kessler, 38123 Trento, ItalyMEMS switches include mobile beams in their mechanical structure and these suspended parts are essential for the device functioning. This paper illustrates the most important instability phenomena related to MEMS switches. Starting from the most important instability exploited in these devices—the electrical actuation—the paper also analyzes other important effects related to instability phenomena, which are very common in this type of technology. Instabilities due to dielectric charge trapping, fabrication tolerances, mechanical deformation, contact wear, and temperature variation are duly analyzed, giving a comprehensive view of the complexity encountered in the reliable functioning of these apparently simple devices.https://www.mdpi.com/2076-0825/8/1/15RF-MEMSRF switchelectrical actuation
collection DOAJ
language English
format Article
sources DOAJ
author Viviana Mulloni
spellingShingle Viviana Mulloni
Instability and Drift Phenomena in Switching RF-MEMS Microsystems
Actuators
RF-MEMS
RF switch
electrical actuation
author_facet Viviana Mulloni
author_sort Viviana Mulloni
title Instability and Drift Phenomena in Switching RF-MEMS Microsystems
title_short Instability and Drift Phenomena in Switching RF-MEMS Microsystems
title_full Instability and Drift Phenomena in Switching RF-MEMS Microsystems
title_fullStr Instability and Drift Phenomena in Switching RF-MEMS Microsystems
title_full_unstemmed Instability and Drift Phenomena in Switching RF-MEMS Microsystems
title_sort instability and drift phenomena in switching rf-mems microsystems
publisher MDPI AG
series Actuators
issn 2076-0825
publishDate 2019-02-01
description MEMS switches include mobile beams in their mechanical structure and these suspended parts are essential for the device functioning. This paper illustrates the most important instability phenomena related to MEMS switches. Starting from the most important instability exploited in these devices—the electrical actuation—the paper also analyzes other important effects related to instability phenomena, which are very common in this type of technology. Instabilities due to dielectric charge trapping, fabrication tolerances, mechanical deformation, contact wear, and temperature variation are duly analyzed, giving a comprehensive view of the complexity encountered in the reliable functioning of these apparently simple devices.
topic RF-MEMS
RF switch
electrical actuation
url https://www.mdpi.com/2076-0825/8/1/15
work_keys_str_mv AT vivianamulloni instabilityanddriftphenomenainswitchingrfmemsmicrosystems
_version_ 1716815720152563712

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