A low-cost fabrication method of nanostructures by ultraviolet proximity exposing lithography
The lithography contact/proximity printing technique is widely used in the fabrication of microelectronic components, optical devices, and micro-fluidic chips. However, the fabrication of nano-sized structures requires high-cost equipment. This paper proposes a low-cost method to manufacture nanostr...
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-04-01
|
| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0002942 |