A data mining approach for analyzing semiconductor MES and FDC data to enhance overall usage effectiveness (OUE)
Wafer fabrication is a complex and lengthy process that involves hundreds of process steps with monitoring numerous process parameters at the same time for yield enhancement. Big data is automatically collected during manufacturing processes in modern wafer fabrication facility. Thus, potential usef...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Atlantis Press
2014-07-01
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| Series: | International Journal of Computational Intelligence Systems |
| Subjects: | |
| Online Access: | https://www.atlantis-press.com/article/25868570.pdf |