Hysteresis Compensation and Sliding Mode Control with Perturbation Estimation for Piezoelectric Actuators

Hysteresis Compensation and Sliding Mode Control with Perturbation Estimation for Piezoelectric Actuators

Based on the background of atomic force microscope (AFM) driven by piezoelectric actuators (PEAs), this paper proposes a sliding mode control coupled with an inverse Bouc–Wen (BW) hysteresis compensator to improve the positioning performance of PEAs. The intrinsic hysteresis and creep char...

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Bibliographic Details
Main Authors: Bingxiao Ding, Yangmin Li
Format: Article
Language:English
Published: MDPI AG 2018-05-01
Series:Micromachines
Subjects:
micro-positioning
hysteresis compensation
sliding mode control
perturbation estimation
Online Access:http://www.mdpi.com/2072-666X/9/5/241

Internet

http://www.mdpi.com/2072-666X/9/5/241

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