Design Optimization and Fabrication of High-Sensitivity SOI Pressure Sensors with High Signal-to-Noise Ratios Based on Silicon Nanowire Piezoresistors

Design Optimization and Fabrication of High-Sensitivity SOI Pressure Sensors with High Signal-to-Noise Ratios Based on Silicon Nanowire Piezoresistors

In order to meet the requirement of high sensitivity and signal-to-noise ratios (SNR), this study develops and optimizes a piezoresistive pressure sensor by using double silicon nanowire (SiNW) as the piezoresistive sensing element. First of all, ANSYS finite element method and voltage noise models...

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Bibliographic Details
Main Authors: Jiahong Zhang, Yang Zhao, Yixian Ge, Min Li, Lijuan Yang, Xiaoli Mao
Format: Article
Language:English
Published: MDPI AG 2016-10-01
Series:Micromachines
Subjects:
silicon nanowire
piezoresistive pressure sensor
high-sensitivity
high signal-to-noise ratio
optimized design
fabrication process
data fusion
particle swarm optimization–back-propagation (PSO–BP) neural network
temperature drift compensation
Online Access:http://www.mdpi.com/2072-666X/7/10/187

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