High-speed electrodeposition for Cu pillar fabrication and Cu pillar adhesion to an Ajinomoto build-up film (ABF)
The fabrication of Cu pillars has recently attracted much attention from the microelectronic/communication industry because pillars can act as thermal dissipation devices and electrical interconnections among different packaging levels, providing efficient utilization of space in microelectronic pac...
Main Authors: | Pei-Tzu Lee, Chih-Hao Chang, Cheng-Yu Lee, Ying-Syuan Wu, Cheng-Hsien Yang, Cheng-En Ho |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2021-08-01
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Series: | Materials & Design |
Subjects: | |
Online Access: | http://www.sciencedirect.com/science/article/pii/S026412752100383X |
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