High-speed electrodeposition for Cu pillar fabrication and Cu pillar adhesion to an Ajinomoto build-up film (ABF)

The fabrication of Cu pillars has recently attracted much attention from the microelectronic/communication industry because pillars can act as thermal dissipation devices and electrical interconnections among different packaging levels, providing efficient utilization of space in microelectronic pac...

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Bibliographic Details
Main Authors: Pei-Tzu Lee, Chih-Hao Chang, Cheng-Yu Lee, Ying-Syuan Wu, Cheng-Hsien Yang, Cheng-En Ho
Format: Article
Language:English
Published: Elsevier 2021-08-01
Series:Materials & Design
Subjects:
TEM
Online Access:http://www.sciencedirect.com/science/article/pii/S026412752100383X