Fabrication of Mesoscale Channel by Scanning Micro Electrochemical Flow Cell (SMEFC)
A unique micro electrochemical machining (ECM) method based on a scanning micro electrochemical flow cell (SMEFC), in which the electrolyte is confined beneath the tool electrode instead of spreading on the workpiece surface, has been developed and its feasibility for fabricating mesoscale channels...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-05-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/8/5/143 |