Epitaxial lift-off of freestanding (011) and (111) SrRuO3 thin films using a water sacrificial layer
Abstract Two-dimensional freestanding thin films of single crystalline oxide perovskites are expected to have great potential in integration of new features to the current Si-based technology. Here, we showed the ability to create freestanding single crystalline (011)- and (111)-oriented SrRuO3 thin...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
Nature Publishing Group
2021-06-01
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Series: | Scientific Reports |
Online Access: | https://doi.org/10.1038/s41598-021-91848-2 |