Oxidation of Au/Ag films by oxygen plasma: phase separation and generation of nanoporosity
The oxidation of Au/Ag alloy thin films using radio-frequency oxygen plasma was studied in this work. It was demonstrated that there is a phase separation occurring between silver and gold. In addition, it was shown that the preferential oxidation of silver resulted in a solid-state diffusion of sil...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Beilstein-Institut
2020-10-01
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| Series: | Beilstein Journal of Nanotechnology |
| Subjects: | |
| Online Access: | https://doi.org/10.3762/bjnano.11.143 |