Application of the method of self-extending high-temperature synthesis for receiving porous vacuum inserts of faceplates of electronic mechanical engineering equipment
There are given the results of research the process of receiving by method of self-extending high-temperature synthesis of porous vacuum inserts of the faceplates used by production of semiconductor silicon plates at the enterprises of electronic mechanical engineering.
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| Format: | Article |
| Language: | Russian |
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Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
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| Online Access: | https://doklady.bsuir.by/jour/article/view/1072 |
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Article |
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doaj-512c91e3ac7f4d3a9dfb4812ae5fae322021-07-28T16:19:56ZrusEducational institution «Belarusian State University of Informatics and Radioelectronics»Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki1729-76482019-06-01025101071Application of the method of self-extending high-temperature synthesis for receiving porous vacuum inserts of faceplates of electronic mechanical engineering equipmentM. V. Tumilovich0L. P. Pilinivich1A. M. Taraykovich2V. E. Tolstik3G. A. Sheko4Belarusian state university of informatics and radioelectronicsBelarusian state university of informatics and radioelectronicsSSI «Institute of powder metallurgy»SSI «Institute of powder metallurgy»SSI «Institute of powder metallurgy»There are given the results of research the process of receiving by method of self-extending high-temperature synthesis of porous vacuum inserts of the faceplates used by production of semiconductor silicon plates at the enterprises of electronic mechanical engineering.https://doklady.bsuir.by/jour/article/view/1072semiconductor silicon platespowder metallurgyself-extending high-temperature synthesisoxynitride of the titan |
| collection |
DOAJ |
| language |
Russian |
| format |
Article |
| sources |
DOAJ |
| author |
M. V. Tumilovich L. P. Pilinivich A. M. Taraykovich V. E. Tolstik G. A. Sheko |
| spellingShingle |
M. V. Tumilovich L. P. Pilinivich A. M. Taraykovich V. E. Tolstik G. A. Sheko Application of the method of self-extending high-temperature synthesis for receiving porous vacuum inserts of faceplates of electronic mechanical engineering equipment Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki semiconductor silicon plates powder metallurgy self-extending high-temperature synthesis oxynitride of the titan |
| author_facet |
M. V. Tumilovich L. P. Pilinivich A. M. Taraykovich V. E. Tolstik G. A. Sheko |
| author_sort |
M. V. Tumilovich |
| title |
Application of the method of self-extending high-temperature synthesis for receiving porous vacuum inserts of faceplates of electronic mechanical engineering equipment |
| title_short |
Application of the method of self-extending high-temperature synthesis for receiving porous vacuum inserts of faceplates of electronic mechanical engineering equipment |
| title_full |
Application of the method of self-extending high-temperature synthesis for receiving porous vacuum inserts of faceplates of electronic mechanical engineering equipment |
| title_fullStr |
Application of the method of self-extending high-temperature synthesis for receiving porous vacuum inserts of faceplates of electronic mechanical engineering equipment |
| title_full_unstemmed |
Application of the method of self-extending high-temperature synthesis for receiving porous vacuum inserts of faceplates of electronic mechanical engineering equipment |
| title_sort |
application of the method of self-extending high-temperature synthesis for receiving porous vacuum inserts of faceplates of electronic mechanical engineering equipment |
| publisher |
Educational institution «Belarusian State University of Informatics and Radioelectronics» |
| series |
Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| issn |
1729-7648 |
| publishDate |
2019-06-01 |
| description |
There are given the results of research the process of receiving by method of self-extending high-temperature synthesis of porous vacuum inserts of the faceplates used by production of semiconductor silicon plates at the enterprises of electronic mechanical engineering. |
| topic |
semiconductor silicon plates powder metallurgy self-extending high-temperature synthesis oxynitride of the titan |
| url |
https://doklady.bsuir.by/jour/article/view/1072 |
| work_keys_str_mv |
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