Application of the method of self-extending high-temperature synthesis for receiving porous vacuum inserts of faceplates of electronic mechanical engineering equipment
There are given the results of research the process of receiving by method of self-extending high-temperature synthesis of porous vacuum inserts of the faceplates used by production of semiconductor silicon plates at the enterprises of electronic mechanical engineering.
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| Subjects: | |
| Online Access: | https://doklady.bsuir.by/jour/article/view/1072 |