Impact of assembly on signal detection from thin-wall rotors of micro-gyroscopes
The assembly of sealed hollow rotors, a key component in achieving liquid-levitated micro-gyroscopes, represents a significant challenge. The rotor is a thin-wall cylinder composed of materials that are only 100-μm thick. Furnace soldering and hand soldering are used to join the work pieces, but pro...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2014-03-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.4869618 |