A Flexible Sensing Unit Manufacturing Method of Electrochemical Seismic Sensor

A Flexible Sensing Unit Manufacturing Method of Electrochemical Seismic Sensor

This paper presents an electrochemical seismic sensor in which paraylene was used as a substrate and insulating layer of micro-fabricated electrodes, enabling the detection of seismic signals with enhanced sensitivities in comparison to silicon-based counterparts. Based on microfabrication, paralene...

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Bibliographic Details
Main Authors:	Guanglei Li, Zhenyuan Sun, Junbo Wang, Deyong Chen, Jian Chen, Lianhong Chen, Chao Xu, Wenjie Qi, Yu Zheng
Format:	Article
Language:	English
Published:	MDPI AG 2018-04-01
Series:	Sensors
Subjects:	electrochemical seismic sensor parylene substrate sensitivity increasing noise level
Online Access:	http://www.mdpi.com/1424-8220/18/4/1165

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