Laser Self-Mixing Grating Interferometer for MEMS Accelerometer Testing
A simple and robust testing system based on a laser self-mixing grating interferometer (SMGI) is proposed to determine the sensitivity of accelerometers. Self-mixing grating interference occurs when the light emitted from a laser diode is incident onto a reflective grating at a fixed angle and the f...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2018-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8255609/ |