Development of a Compact Three-Degree-of-Freedom Laser Measurement System with Self-Wavelength Correction for Displacement Feedback of a Nanopositioning Stage

Development of a Compact Three-Degree-of-Freedom Laser Measurement System with Self-Wavelength Correction for Displacement Feedback of a Nanopositioning Stage

This paper presents a miniature three-degree-of-freedom laser measurement (3DOFLM) system for displacement feedback and error compensation of a nanopositioning stage. The 3DOFLM system is composed of a miniature Michelson interferometer (MMI) kit, a wavelength corrector kit, and a miniature autocoll...

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Bibliographic Details
Main Authors: Yindi Cai, Zhifeng Lou, Siying Ling, Bo-syun Liao, Kuang-chao Fan
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Applied Sciences
Subjects:
laser diode
interferometer
wavelength corrector
angular error
nanopositioning stage
Online Access:https://www.mdpi.com/2076-3417/8/11/2209

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