Development of a Compact Three-Degree-of-Freedom Laser Measurement System with Self-Wavelength Correction for Displacement Feedback of a Nanopositioning Stage
This paper presents a miniature three-degree-of-freedom laser measurement (3DOFLM) system for displacement feedback and error compensation of a nanopositioning stage. The 3DOFLM system is composed of a miniature Michelson interferometer (MMI) kit, a wavelength corrector kit, and a miniature autocoll...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-11-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/8/11/2209 |