A Small-Displacement Sensor Using Total Internal Reflection Theory and Surface Plasmon Resonance Technology for Heterodyne Interferometry
A small-displacement sensor based on total-internal reflection theory and surface plasmon resonance technology is proposed for use in heterodyne interferometry. A small displacement can be obtained simply by measuring the variation in phase difference between s- and p-polarization states with the sm...
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Format: | Article |
Language: | English |
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MDPI AG
2009-04-01
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Series: | Sensors |
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Online Access: | http://www.mdpi.com/1424-8220/9/4/2498/ |