The Study of the DLC and DLC-Si Coating Structure on Mechanical Properties
In this paper, diamond-like carbon (DLC) films and DLC-Si films were studied. These films were deposited by DC-plasma-assisted chemical vapour deposition (PACVD). X-ray diffraction analysis of coatings was used for a determination of coatings structure. In particular, the effect of the crystal struc...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Taiwan Association of Engineering and Technology Innovation
2013-04-01
|
| Series: | International Journal of Engineering and Technology Innovation |
| Subjects: | |
| Online Access: | http://ojs.imeti.org/index.php/IJETI/article/view/102 |