ZnO:Al Grown by Sputtering from Two Different Target Sources: A Comparison Study
Al-doped ZnO thin films were deposited from two different targets. Ceramic targets were used in RF magnetron sputtering, whereas pulsed magnetron sputtering was used to grow films from powder targets. ZnO:Al films with different thicknesses were sputtered directly on soda-lime glass substrates. The...
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| Format: | Article |
| Language: | English |
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Hindawi Limited
2012-01-01
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| Series: | Advances in Condensed Matter Physics |
| Online Access: | http://dx.doi.org/10.1155/2012/682125 |