Prediction of the Surface Oxidation Process of AlCuFe Quasicrystals by Using Artificial Neural Network Techniques

Prediction of the Surface Oxidation Process of AlCuFe Quasicrystals by Using Artificial Neural Network Techniques

In this paper, we present a method to determine the inputs of a manufacturing process used in Microelectromechanical System (MEMS) that will drive its output to desired targets. This method uses a combination of artificial neural network (ANN) modeling and the inverse control together with optimiza...

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Bibliographic Details
Main Authors: MOH'D SAMI S. ASHHAB, ABDULLA N. OIMAT, NABEEL ABO SHABAN
Format: Article
Language:English
Published: IFSA Publishing, S.L. 2011-05-01
Series:Sensors & Transducers
Subjects:
Artificial Neural Network
MEMS
Oxidation
Optimization
Quasicrystals
i-AlCuFe
Inverse control
Online Access:http://www.sensorsportal.com/HTML/DIGEST/may_2011/P_799.pdf

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http://www.sensorsportal.com/HTML/DIGEST/may_2011/P_799.pdf

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