Tungsten as a Chemically-Stable Electrode Material on Ga-Containing Piezoelectric Substrates Langasite and Catangasite for High-Temperature SAW Devices

Tungsten as a Chemically-Stable Electrode Material on Ga-Containing Piezoelectric Substrates Langasite and Catangasite for High-Temperature SAW Devices

Thin films of tungsten on piezoelectric substrates La3Ga5SiO14 (LGS) and Ca3TaGa3Si2O14 (CTGS) have been investigated as a potential new electrode material for interdigital transducers for surface acoustic wave-based sensor devices operating at high temperatures up to 800 °C under vacuum conditions....

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Bibliographic Details
Main Authors: Gayatri K. Rane, Marietta Seifert, Siegfried Menzel, Thomas Gemming, Jürgen Eckert
Format: Article
Language:English
Published: MDPI AG 2016-02-01
Series:Materials
Subjects:
high temperature sensor
surface acoustic wave devices
electrode material
refractory metal thin film
Online Access:http://www.mdpi.com/1996-1944/9/2/101

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http://www.mdpi.com/1996-1944/9/2/101

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